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1-0414 — Specification for SOAP Binding of Data Collection Management (DCM)
SEMI D41 — Measurement Method of SEMI Mura in Flat Panel Display Image Quality Inspection
subassemblies
SEMI M1-1106 (technical revision)
P00500 - SEMI P5 - Specification for Pellicles Revision:SEMI P5-0416 (Reapproved 1221) - Current 1-0414 — Specification for SOAPThis Specification covers the general requirements for pellicles used on photomasks or reticles in photolithographic exposure systems. This Specification covers pellicles for use in either broadband, polychromatic or monochromatic exposure systems. Referenced SEMI Standards (purchase separately) None. Revision History SEMI P5 0416 (Reapproved 1221) SEMI P5 0416 (technical revision) SEMI P5 0704 (technical revision) SEMI P5 94 (Reapproved 1103) SEMI P5