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6-93 (technical revision)
the interface requirements are meant to avoid the promotion of any particular form of transport
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2 This standard specifies procedures to measure extractable metal impurities from perfluoroalkoxy alkane (PFA) and other fluorinated materials and from high purity liquid distribution components
C00200 - SEMI C2 - Specifications for Etchants StdPbc-0219 6-93 (technical revision)This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on December 20, 2007. It was available at www. semi. org in February 2008. Originally published in 1995. NOTICE: This Document was balloted and approved for withdrawal in 2008. The SEMI Committee on Chemical Reagents began its efforts on etchants in 1979. With this publication, the