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M01500 - SEMI M15 - Polished Wafer Defect Limits Table for Semi-Insulating Gallium Arsenide Wafers StdPbc-0615 cleaning agents

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cleaning agents

and the responsibility of consumers to assess particular implementations for use in their factories

11-1106 (technical revision)

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M01500 - SEMI M15 - Polished Wafer Defect Limits Table for Semi-Insulating Gallium Arsenide Wafers StdPbc-0615 cleaning agentsThis document defines the maximum number of defects, by type, that an acceptable polished Semi Insulating Gallium Arsenide (GaAs) wafer may exhibit. Referenced SEMI Standards None.

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