E11500 - SEMI E115 - Test Method for Determining the Load Impedance and Efficiency of Matching Networks Used in Semiconductor Processing Equipment RF Power Delivery Systems StdPbc-0524 SEMI C28-0705 (technical revision)

SEMI C28-0705 (technical revision)

免責事項：このSEMIスタンダードは，投票により作成された英語版が正式なものであり，日本語版は日本の利用者各位の便宜のために作成したものです。万が一英語と日本語とに差異がある場合には英語版記載内容が優先されます｡

SEMI E21 — Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard

instrument configuration

E11500 - SEMI E115 - Test Method for Determining the Load Impedance and Efficiency of Matching Networks Used in Semiconductor Processing Equipment RF Power Delivery Systems StdPbc-0524 SEMI C28-0705 (technical revision)The purpose of this Standard is to define a test method used to determine the load impedance and efficiency of matching networks used in RF power delivery systems for semiconductor processing equipment. This Standard specifies the testing procedures and test equipment required for determining the load impedance and power efficiency of a matching network based on the positions of the tuning elements in the matching network. The primary focus for this