Pay in 4 interest-free payments of $48.25 Learn more
Ships within 48 hours · Estimated delivery Jul 27 - Aug 1
SEMI E82-0304 (technical revision)
SEMI M73 — Test Method for Extracting Relevant Characteristics from Measured Wafer Edge Profiles
SEMI 3D13-0715 (first published)
Two methods for evaluating particle contribution are provided
F07000 - SEMI F70 - Test Method for Determination of Particle Contribution of Gas Delivery System Revision:SEMI F70-0320 - Current SEMI E82-0304 (technical revision)NOTICE: The designation of SEMI F70 was updated during the 0320 publishing cycle to reflect the creation of SEMI F70. 1. The purpose of this Document is to provide a standardized methodology and procedure for measuring the particle contribution performance of a gas delivery system in terms of number of particles added to gas flowing through the system. This standardized procedure is intended to be used commonly by the gas delivery system suppliers,