M02200 - SEMI M22 - Specification for Dielectrically Isolated (DI) Wafers StdTpc-Minienvironments SEMI PV57-1214 (first published)

SEMI PV57-1214 (first published)

For conducting material

and CS106 test methods defined in MIL-STD 461G

5-0211 (Reapproved 0623)

M02200 - SEMI M22 - Specification for Dielectrically Isolated (DI) Wafers StdTpc-Minienvironments SEMI PV57-1214 (first published)This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published in 1992; previously published March 2003. NOTICE: This document was balloted and approved for withdrawal in 2007. Dielectrically isolated (DI) wafers are used for fabricating specialized