F07900 - SEMI F79 - Guide for Gas Compatibility with Silicon Used in Gas Distribution Components Revision:SEMI F79-0703 - Superseded SEMI F98-0618 (complete rewrite)

SEMI F98-0618 (complete rewrite)

odorless and tasteless

and affected substrates

and patterned wafers

F07900 - SEMI F79 - Guide for Gas Compatibility with Silicon Used in Gas Distribution Components Revision:SEMI F79-0703 - Superseded SEMI F98-0618 (complete rewrite)The purpose of this Guide is to identify resource information on compatibility of gases in contact with silicon in the wetted path of a gas delivery system operating at typical gas distribution system conditions. The information and conclusions provided are taken from published literature. References are cited. Recommendations are made based on the cited literature, although no opinion is made as to the validity of the cited literature. The