E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange StdPbc-1121 This Test Method is applied

This Test Method is applied for

SEMI A1-0521 (technical revision)

SEMI D9-0303 (Reapproved 0515)

4-0997 (first published - replaces SEMI E59)

E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange StdPbc-1121 This Test Method is appliedNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification is intended to promote consistent interface features between person guided vehicles (PGV) and equipment with a load port. This Specification defines a mechanical standard for the stationary (equipment)