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It is expected that this Test Method will be used to validate moisture standards before they are first placed in use
SEMI C29-1110 (technical revision)
9998% Quality
then the validation should be repeated after verifying the physical measurement upon which the prediction is based and any other parameters deemed suspect
C05200 - SEMI C52 - Specification for the Shelf Life of a Specialty Gas Revision:SEMI C52-0301 (Reapproved 0312) - Superseded It is expected that thisThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www. semiviews. org and www. semi. org in June 2018; originally published March 2001; previously published March 2012. The purpose of this Document is to define terminology and to recommend minimum periods for the shelf lives of specialty gases. It is
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