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orgで入手可能になり，2004年11月発行に至る。初版は1990年。
• the cylinder preparation process and in-situ reactions of diborane with the internal surface of the cylinder
This guideline only defines the zones and volumes for them and the exact placement of them within these zone and volumes are at the direction of the load port suppliers
SEMI G10-96 (technical revision)
M02900 - SEMI M29 - Specification for 300 mm Shipping Box Revision:SEMI M29-1296 (Reapproved 1103) - Superseded orgで入手可能になり，2004年11月発行に至る。初版は1990年。This specification was technically approved by the global Silicon Wafer Committee and is the direct responsibility of the Japanese Silicon Wafer Committee. Current edition approved by the Japanese Regional Standards Committee on August 8, 2003. Initially available at www. semi. org September 2003; to be published November 2003. Originally published December 1996. This specification defines a container for safe transportation of 300 mm wafers from a
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