Semiconductor devices. Micro-electromechanical devices - Bulge test method for measuring mechanical properties of thin films Ingestion-build-96603 unique reference number or external

unique reference number or external cross reference

open vented or sealed

in accordance with IEC 60512-9-3

10- Short-chain alkylbenzenesulphonates content for

Semiconductor devices. Micro-electromechanical devices - Bulge test method for measuring mechanical properties of thin films Ingestion-build-96603 unique reference number or externalWhat is BS EN 62047 17 Mechanical properties of thin films about? BS EN 62047 17 is the 17th part of an international standard used for semiconductor devices. BS EN 62047 17 specifies the method for performing bulge tests on the free standing film that is bulged within a window. The specimen is fabricated with micro nano structural film materials, including metal, ceramic and polymer films, for MEMS, micromachines and others. The thickness of the film