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SEMI E90-0705 (technical revision)
Equipment Communications Standard (SECS-I)
independent of which process module the current event report represents
The form in which this data is provided is intended to be comprehensible to both humans and software applications
M01200 - SEMI M12 - Specification for Serial Alphanumeric Marking of Silicon Wafers StdPbc-1121 SEMI E90-0705 (technical revision)This Specification describes a coded alphanumeric marking of silicon or other semiconductor wafers. The wafer alphanumeric code links the properties of the wafer stored in an appropriate database system to each individual wafer for purposes of tracking and control during wafer and device manufacture. Use of this Specification ensures the consistency of all wafers marking performed by silicon manufacturers. This consistency allows simplification of the