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SEMI C44-1223 (technical revision)
SEMI C44-0618 (technical revision)
SEMI文書，特にSEMI P35から構造や用語を引用している。
which is intended to serve for gases to be used in the manufacture and processing of semiconductors and advanced electronic devices and circuits
C05600 - SEMI C56 - Specification for Dichlorosilane (SiH2Cl2) Revision:SEMI C56-0224 - Current SEMI C44-1223 (technical revision)This Standard provides a series of specifications for different grades of dichlorosilane (SiH2Cl2) that are used in the semiconductor industry. This Specification covers requirements for all grades of dichlorosilane (SiH2Cl2) used in the semiconductor industry. If analytical methods are not complete, the requirements are presented as a guideline. Referenced SEMI Standards (purchase separately) SEMI C3. 18 Specification for Dichlorosilane (SiH2Cl2) in