D03200 - SEMI D32 - Specification for Improved Information Management for Glass FPD Substrates Through Orientation Corner Unification Revision:SEMI D32-0303 - Superseded The specific format and protocol

The specific format and protocol implementation of these interface specifications

It is meant to provide consistency in terminology among gas suppliers and to provide a general guideline for users of these gases

11-1105 (technical revision)

The user is referred to product labels

D03200 - SEMI D32 - Specification for Improved Information Management for Glass FPD Substrates Through Orientation Corner Unification Revision:SEMI D32-0303 - Superseded The specific format and protocolThis Standard was technically approved by the Flat Panel Display Factory Automation Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2009. Available at www. semi. org in July 2009; originally published March 2003. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety